Multi-gate devices rely on a very thin body to achieve good electrostatic control. While narrow channel is desirable, narrow source/drain extensions can increase parasitic capacitance. Different layout approaches (tapered source/drain, dog-bone transistor) have been used to alleviate this problem, resulting in quite different currents . Multigate devices with L=20nm and W=65nm and excellent device performance were reported . An important aspect of their manufacturability is how important the misalignment of the gate relative to the source and drain is. In this paper we present experimental and simulation data for the 45nm technology node and present interesting results for variable-width transistors.
Alice walked through the gate and out to the track. Sunshine camethrough the roof of the shed and burned the cinders like black diamonds.The atmosphere had a palpable texture and was acrid with smoke. Anengine rushed down upon her, steaming and shining. The red cars werecovered with a yellow-gray film of dust that made them orange bright.The windows glittered.
II. According to the decision, the distinguishing feature over D1, which was the closest state of the art, was the width of the relative standard deviation of the size of the silica particles. The technical problem arising was that of providing polyester films for magnetic tapes having an improved abrasion resistance and a decreased coefficient of friction. It was, however, taught in D7 that such biaxially oriented polyester films comprising conventional filler particles with uniform particle size and with a particle size distribution with a small steep maximum achieved excellent slipperiness and surface roughness, as well as very good mechanical and electromagnetic properties. Furthermore, it was known from D2 that a biaxially oriented aromatic polyester film containing inert fine particles having a controlled (i.e. narrow) particle size distribution had excellent surface properties. Consequently, it would have been obvious to select a silica filler having a narrow particle size distribution according to D7 or D2 for the polyester film according to D1. The skilled person would have known from D6 how to provide a silica filler having such a narrow particle size distribution. Thus the claimed subject-matter was obvious.
In order to determine the issue of inventive step, it is necessary to consider whether the skilled person, starting from D1*, would have expected an improvement in surface mechanical properties of the polyester film, in particular its slipperiness and abrasion resistance, to be obtained by the measure of replacing the colloidal silica by spherical fine particles of silica limited to a narrow size range corresponding to a value of the relative standard deviation ( ) up to 0.3.
6.3. According to D7, a polyester film for magnetic recording purposes has minute protrusions on its surface, having a specified relationship between the surface roughness and the number (H2) of secondary interference bands as measured by a multi-interference method (Claim 1). It is taken that the value of H2 is closely related to the electromagnetic properties of the tape, and the surface roughness to the coefficient of friction (page 8, lines 26 to 28). Whereas H2 should not be too large, the surface roughness should not be too small (page 8, line 26 to page 9, line 18). The film may contain additives such as titanium dioxide, fine particles of silica or kaolin; or a slip agent (page 8, lines 5 to 7). In order to obtain a favourable balance of these two values, it is possible to add to the film material particles of uniform particle size, from which the larger particles have been removed, in order to obtain a particle size distribution curve with a narrow, steep maximum (page 9, line 20 to page 10, line 16). 1e1e36bf2d